JPH0211166U - - Google Patents

Info

Publication number
JPH0211166U
JPH0211166U JP8952688U JP8952688U JPH0211166U JP H0211166 U JPH0211166 U JP H0211166U JP 8952688 U JP8952688 U JP 8952688U JP 8952688 U JP8952688 U JP 8952688U JP H0211166 U JPH0211166 U JP H0211166U
Authority
JP
Japan
Prior art keywords
crystal growth
raw material
single crystal
growth apparatus
melt
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8952688U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0543107Y2 (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988089526U priority Critical patent/JPH0543107Y2/ja
Publication of JPH0211166U publication Critical patent/JPH0211166U/ja
Application granted granted Critical
Publication of JPH0543107Y2 publication Critical patent/JPH0543107Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP1988089526U 1988-07-07 1988-07-07 Expired - Lifetime JPH0543107Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988089526U JPH0543107Y2 (en]) 1988-07-07 1988-07-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988089526U JPH0543107Y2 (en]) 1988-07-07 1988-07-07

Publications (2)

Publication Number Publication Date
JPH0211166U true JPH0211166U (en]) 1990-01-24
JPH0543107Y2 JPH0543107Y2 (en]) 1993-10-29

Family

ID=31314075

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988089526U Expired - Lifetime JPH0543107Y2 (en]) 1988-07-07 1988-07-07

Country Status (1)

Country Link
JP (1) JPH0543107Y2 (en])

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5690285U (en]) * 1980-09-26 1981-07-18
JPH04154688A (ja) * 1990-10-17 1992-05-27 Komatsu Electron Metals Co Ltd 半導体単結晶製造装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6126592A (ja) * 1984-07-18 1986-02-05 Fujitsu Ltd 結晶成長装置
JPS6136197A (ja) * 1984-07-06 1986-02-20 ゼネラル　シグナル　コーポレーシヨン チヨクラルスキー技術を用いて浅いるつぼから半導体材料の単結晶を成長させる装置及び方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6136197A (ja) * 1984-07-06 1986-02-20 ゼネラル　シグナル　コーポレーシヨン チヨクラルスキー技術を用いて浅いるつぼから半導体材料の単結晶を成長させる装置及び方法
JPS6126592A (ja) * 1984-07-18 1986-02-05 Fujitsu Ltd 結晶成長装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5690285U (en]) * 1980-09-26 1981-07-18
JPH04154688A (ja) * 1990-10-17 1992-05-27 Komatsu Electron Metals Co Ltd 半導体単結晶製造装置

Also Published As

Publication number Publication date
JPH0543107Y2 (en]) 1993-10-29

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